ICSPI has been researching and developing CMOS MEMS technology for scanning probe microscopes since 2007. Leveraging the world-class facilities and expertise at the University of Waterloo along with support from DARPA, ICSPI is commercializing the next generation of nanoscale metrology tools.
D. Strathearn, N. Sarkar, G. Lee , M. Olfat , and R. R. Mansour, "The Benefits of Miniaturization of an Atomic Force Microscope", Proceedings of the 30th international conference on MEMS, 2017.
M. Olfat, D. Strathearn, G. Lee, N. Sarkar, S. C. Hung, and R. R. Mansour, "A Single-Chip Scanning Probe Microscope Array", Proceedings of the 30th international conference on MEMS, 2017.
N. Sarkar, G. Lee, D. Strathearn, M. Olfat, R.R. Mansour, "A Multimode Single-Chip Scanning Probe Microscope for Simultaneous Topographical and Thermal Metrology at the Nanometer Scale", Proceedings of the 29th international conference on MEMS, 2016.
N. Sarkar, D. Strathearn, G.Lee, M. Olfat, R.R.Mansour, "A 0.25mm3 Atomic Force Microscope on-a-chip," Proceedings of the 28th international conference on MEMS, 2015.
D. Strathearn, G. Lee, N. Sarkar, M. Olfat, R.R. Mansour, "A distortion-free single-chip atomic force microscope with 2DOF isothermal scanning," The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), pp 2113-2116, 2015.
N. Sarkar, R. R. Mansour, “Single-chip atomic force microscope with integrated Q-enhancement and isothermal scanning,” Proceedings of the 27th international conference on MEMS, 2014.
A. Azizi, N. Sarkar, R. Mansour, “Single-Chip CMOS-MEMS Dual Mode Scanning Microwave Microscope,” IEEE Transactions on Microwave Theory and Techniques, Vol. 61, Issue 12, pp. 4621-4629, 2013.
N. Sarkar, G. Lee, and R. Mansour, “CMOSMEMS dynamic FM atomic force microscope,” in Solid-State Sensors, Actuators and Microsystems, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. IEEE, 2013.
N. Sarkar , R. R. Mansour , O. Patange , K. Trainor, “CMOS-MEMS Atomic force microscope," Transducers 2011 pp. 2610–2613, 2011.
N. Sarkar and R. Mansour, “A CMOS-MEMS scanning probe microscope with integrated position sensors,” 1st Microsystems Nanoelectron. Res. Conf. MNRC 2008 - Enabling Synerg. Accel. Excell. Grad. Student Res., pp. 77–80, 2008.
US Patent #US8402561 B2 "MEMS actuator device with integrated temperature sensors"
US Patent #US9267962 B2 "Scanning probe microscope comprising an isothermal actuator"
US Patent #US6806991 B1 "Fully released MEMs XYZ flexure stage with integrated capacitive feedback"
US Patent #US6698201 B1 "Cascaded bimorph rotary actuator"
US Patent #US6718764 B1 "System and method for microstructure positioning using metal yielding"
US Patent #US6679055 B1 "Electrothermal quadmorph microactuator"